Mirror Paddle
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The micro-nano fiber SiC material product mirror paddle is a key component of the semiconductor wafer loading system. The mirror paddle is stable in performance, does not deform under high temperatures, has a large wafer loading capacity, and is suitable for robotic automatic loading and handling systems. Because the cross-section of the micro-nano fiber SiC mirror paddle remains stable and does not deform, it makes it possible to prepare larger-specification wafers using existing furnace tubes.
The thermal expansion coefficient of the micro-nano fiber SiC mirror paddle is close to that of the PLCVD coating, so its application in PLCVD can greatly extend the maintenance and cleaning cycle and significantly reduce pollutants.
Sanyuan Huaxin
Refractory materials
Special ceramics
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COMPANY ADVANTAGES
Silicon carbide ceramics not only have excellent room temperature mechanical properties, such as high flexural strength, good corrosion resistance, high wear resistance and low friction coefficient, but also have better high temperature mechanical properties (strength, creep resistance, etc.) than known ceramic materials.
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